Travel speed Vmax [m/s] | ||||||
---|---|---|---|---|---|---|
Resolution [µm] | 1 | 4.00 | 1.60 | 0.72 | 0.32 | 0.12 |
5 | 8.00 | 8.00 | 3.60 | 1.60 | 0.62 | |
10 | 8.00 | 8.00 | 7.20 | 3.20 | 1.25 | |
12.5 | 8.00 | 8.00 | 8.00 | 4.00 | 1.60 | |
Pulse interval [μs] | 0.2 | 0.5 | 1.1 | 2.5 | 6.3 | |
Counting frequency [kHz] | 1250.00 | 500.00 | 230.00 | 100.00 | 40.00 |